Mechanical-Thermal Noise in Drive-Mode of a Silicon Micro-Gyroscope
نویسندگان
چکیده
منابع مشابه
Mechanical-Thermal Noise in Drive-Mode of a Silicon Micro-Gyroscope
A new closed-loop drive scheme which decouples the phase and the gain of the closed-loop driving system was designed in a Silicon Micro-Gyroscope (SMG). We deduce the system model of closed-loop driving and use stochastic averaging to obtain an approximate "slow" system that clarifies the effect of thermal noise. The effects of mechanical-thermal noise on the driving performance of the SMG, inc...
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ژورنال
عنوان ژورنال: Sensors
سال: 2009
ISSN: 1424-8220
DOI: 10.3390/s90503357